First IMPACT+ Workshop, KLA-Tencor, October 12, 2012
Friday, October 12, 2012, 12 noon - 5 pm at KLA-Tencor, Milpitas, CA 95305.

Free Online Registration Registed people
Please register now.

Uploading Your Publications
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Important Timetable
5:00pm Tue. October 2 Poster titles/advisors/categories due
5:00pm Tue. October 2 Posters due to studentsí professors
5:00pm Wed. October 3 Final posters due
5:00pm Fri. October 5 Publication Uploading due
5:00pm Fri. October 5 Final talks due

AgendaPosters and Talks (PDF)
  • 12:00 -12:45pm      Lunch and Registration
  • 12:45pm - 1:15pm  Introduction (Puneet Gupta)
  • 1:15pm - 1:45pm    Status of REBEL, an E-beam Direct-Write Lithography (Chris Bevis, KLA-Tencor)
  • 1:45pm - 2:15pm    Computational phase metrology for accurate OPC, EUV defect and wafer modeling (Laura Waller)
  • 2:15pm - 2:30pm    Break
  • 2:30pm - 2:50pm    Effect of Periodic Virtual Metrology Recalibration on the Performance of Blended Metrology Schemes (Claire Baek)
  • 2:50pm - 3:10pm    6-T SRAM cell design with gate-all-around silicon nanowire MOSFETs (Yibo Liao)
  • 3:10pm - 3.30pm    Avoidance Techniques to Mitigate EUV Mask Defects (Abde Ali Kagalwalla)
  • 3:30pm - 4:30pm    Poster Session
  • 4:30pm - 5:00pm    Steering Committee Meeting
  • 5:00pm - 5:30pm    Feedback Session

KLA-Tencor (Map) (Directions)
One Technology Drive
Milpitas, CA 95035

Come to the lobby of Building 3 for badging.

The presentation room will be the Small Dining Room (Bldg. 3) and the posters will be in the Multipurpose Room West. Our steering committee meeting will be in the Singapore meeting room (lobby of Bldg. 3).

Poster and Talk Naming Conventions
Poster and Talk Topics
Poster topics must be one of the following
Computation, DMI, Process, Technology
(DMI = Design-Manufacturing Interface)

Poster Templates
Talk Templates