Overview
The Center for Design-Enabled Nanofabrication (C-DEN), with cross-disciplinary expertise in lithography, resists, etch, integration and computer-aided design, will investigate challenges in design, patterning and fabrication of integrated systems at the 5nm node and beyond. Over its four-year span (2016-2020), we expect the center to continually support 12-15 students and 10-11 PIs through industry funding matched with reduced overhead rates (~25%) and administrative support from the three UC campuses. Our research is organized according to three thrusts - patterning, integration, and design enablement. Details are available at http://cden.ucsd.edu/thrusts.php.