4th C-DEN Workshop

Friday, May 18, 2018
9:30am to 5:00pm
ASML Brion Campus
399 W. Trimble Road
San Jose, CA 95131

The 4th C-DEN Workshop notes available here.

Free Registration
Please register for the 4th C-DEN Workshop here.
(We apologize for the inconvenience but due to ASML restrictions, webcasting of the workshop will not be available.)

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Important Timetable
 
Monday, April 30 Poster/Talk titles/advisors/categories due to Kyle
Monday, May 7 Final Posters/Talk Slides due to Kyle in PDF format
Agenda Outline
 8:30am - 9:30amRegistration / Refreshments
 
9:30am - 9:35am Welcome / Opening Remarks - Andrew Kahng (UCSD)
 
9:35am - 10:00am Morning Keynote - Chris Spence (ASML)
"Computational Process Modeling and Correction in a Multi-Patterning Era"
 
10:00am - 10:30am Faculty Talk / Patterning Theme Deep-Dive - Andy Neureuther (Berkeley)
 
10:30am - 10:45am BREAK
 
10:45am - 12:15pm Student Technical Talks

Patterning
Reflectometry Metrology for EUV
Stuart Sherwin - (Berkeley, Advisor: Waller)

Integration
High-Performance Fine-Pitch Heterogeneous Integration Using Silicon Interconnect Fabric
Siva Jangam - (UCLA, Advisor: Iyer)

Design Enablement
Architecting Waferscale Processors - A GPU Case Study
Saptadeep Pal - (UCLA, Advisor: Gupta)
 
12:15pm - 1:15pm LUNCH
 
1:15pm - 2:15pm Poster Lightning Session

Patterning
  • Surface Chemistry Controlled Patterning of EUV Masks
    Ernest Chen - (UCLA, Advisor: Chang)

  • Advanced Modeling of Anisotropic Stochastics in EUV Resist
    Luke Long - (Berkeley, Advisor: Naulleau, Neureuther)

  • Reflectometry Metrology for EUV
    Stuart Sherwin - (Berkeley, Advisor: Waller)
Integration
  • Growth and Integration Aspects of GaN on GaN, Si, and Ceramic Substrates and their Structural and Electrical Characteristics
    Atsunori Tanaka (UCSD, Advisor: Dayeh)

  • Leveraging High Definition Display Technology on Flex for Biomedical Implants
    Hongseok Oh (UCSD, Advisor: Dayeh )

  • Intrinsically Synthesizable Ultra-Linear GaN multi-Fin MOSHEMT Devices
    Renjie Chen (UCSD, Advisor: Dayeh)

  • High-Performance Fine-Pitch Heterogeneous Integration Using Silicon Interconnect Fabric
    Siva Jangam (UCLA, Advisor: Iyer)

  • Vertical GaN Power MOSFETs on GaN, Si, and Ceramic Substrates
    Woojin Choi (UCSD, Advisor: Dayeh)
Design Enablement
  • The Ultimate Stack: Limits of BEOL Layer Count
    Lutong Wang - (UCSD, Advisor: Kahng)

  • Single vs. Double Diffusion Break: Studies of Leakage and Density Impacts in Sub-10nm VLSI
    Minsoo Kim (UCSD, Advisor: Kahng)

  • Architecting Waferscale Processors - A GPU Case Study
    Saptadeep Pal (UCLA, Advisor: Gupta)

  • Defect Avoidance for Extreme Ultraviolet Mask Defects using Intentional Pattern Deformation
    Yoojin Chae (UCLA, Advisor: Gupta)

2:15pm - 3:30pm Poster Session / Refreshments
 
3:30pm - 4:00pm Steering Committee Meeting
 
4:00pm - 4:30pmSteering Committee + Faculty Meeting
 
Directions

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Poster Templates
Talk Templates