2nd C-DEN Workshop

Friday, May 26, 2017
10:00am to 5:00pm
Samsung Campus
3655 N. First Street
San Jose, CA 95134

The 2nd C-DEN Workshop notes available here.

Agenda Outline
 9:00am - 10:00amRegistration / Refreshments
10:00am - 10:10am Welcome / Opening Remarks - Andrew Kahng, UCSD
10:10am - 10:40am Morning Keynote Rwik Sengupta (Samsung)
"A Perspective on More Moore Scaling Levers and C-DEN Research Targets"
10:40am - 10:50am BREAK
10:50am - 12:10pm Student Technical Talks

Patterning
Stuart Sherwin (Advisor: Waller, UCB)
"Simulation of Ultra-High Efficiency EUV Etched Phase-Shift Mask"

Integration
Steven Moran (Advisor: Iyer, UCLA)
"System Integration & Design of the CHIPS Si-IF"

Design Enablement
Wei-Che Wang (Advisor: Gupta, UCLA)
"Assessing Layout Density Benefits of Vertical Channel Standard Cells"

12:10pm - 1:15pm LUNCH
1:15pm - 2:30pm Poster Lightning Session

Patterning
  • Thermodynamic Prediction and Experimental Verification of Etch Selectivity for EUV Mask Materials
    Nicholas Altieri (Advisor: Chang, UCLA)
  • Experimental and Modeling Study of Low Energy Electron Interactions in EUV Resists
    Suchit Bhattarai (Advisor: Naulleau/Neureuther, UCB)
  • Study of Shot Noise Effects in EUV Resists through EUV/E-Beam Comparisons
    Suchit Bhattarai (Advisor: Naulleau/Neureuther, UCB)
  • Aberration Recover Using Weak Scattering Media
    Gautam Gunjala (Advisor: Waller, UCB)
  • EUV Aerial Imaging Tool Aberrations Using Photomask Substrate Roughness
    Aamod Shanker (Advisor: Waller, UCB)
  • Actinic EUV Scatterometry for Parametric Mask Quantification
    Stuart Sherwin (Advisor: Naulleau/Neureuther/Waller, UCB)
  • Impact of Tool Design on Defect Detection Sensitivity for EUV Actinic Blank Inspection
    Yow-Gwo Wang (Advisor: Naulleau/Neurether, UCB)
Integration
  • Strategies for Controlling the Phase and Contact Resistance in sub-10 nm Self Aligned Contacts
    Renjie Chen (Advisor: Dayeh, UCSD)
  • System Integration & Design of the CHIPS Si-IF
    Steven Moran (Advisor: Iyer, UCLA)
  • Multi-Die Assembly on Silicon Interconnect Fabric
    Saptadeep Pal (Advisor: Gupta, UCLA)
Design Enablement
  • Hotspot-aware Simultaneous Mask Assignment and DSA Grouping
    Yasmine Badr (Advisor: Gupta, UCLA)
  • MAD+DAM: Performance- and Energy-Aware Optimization of BEOL Interconnect Stack Geometry in Advanced Technology Nodes
    Hyein Lee (Advisor: Kahng, UCSD)
  • Implications of Inherent Chaos in EDA Tools and Flows at Advanced Technology Nodes
    Tushar Shah (Advisor: Kahng, UCSD)
  • Improved Clock Routing for Reduced Variability and Better Model-Hardware Correlation
    Sriram Venkatesh (Advisor: Kahng, UCSD)
  • Optimal Multi-Row Detailed Placement for Yield and Model-Hardware Correlation Improvement in Sub-10nm VLSI
    Lutong Wang (Advisor: Kahng, UCSD)
  • Assessing Layout Density Benefits of Vertical Channel Standard Cells
    Wei-Che Wang (Advisor: Gupta, UCLA)
  • A "Pathfinding" Tool For 3D VLSI Technology
    Ahmed Youssef (Advisor: Kahng, UCSD)
2:30pm - 3:45pm
Poster Session / Refreshments
3:45pm - 4:15pm

Steering Committee Meeting

4:15pm - 5:00pm

Steering Committee + Faculty Meeting

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