8th C-DEN Workshop (Postponed to Aug/Sep)

Agenda Outline
10:00am - 10:05am Welcome / Opening Remarks
Andrew Kahng (UCSD)
10:05am - 11:50am Student Presentations
11:50am - 12:00pm Break
10:45am - 12:15pm Student Presentations
Molecular Understanding of EUV Processes—Progress Update
Jonathan Ma

Applications of AFM for Resist Metrology
Long, Luke

Experimental and Computational Studies of Patterning EUV Absorber
Sang, Xia

Extending the Resolution of Extreme Ultraviolet Lithography with Attenuated Phase-Shift Masks
Sherwin, Stuart

ML-Based Feature Recognition Applied to Semiconductor Processing and Packaging
Moran, Steven

Experience and Challenges of Designing a 14000-Core Waferscale System
Pal, Saptadeep

PROBE2.0: A Systematic Framework for Routability Assessment from Technology to Design in Sub-7nm Nodes
Kim, Minsoo

11:50pm - 12:00pm Break
12:00pm - 12:30pm Beyond C-DEN
12:30pm - 1:00pm Break
1:00pm - 2:00pm Steering Committee Meeting
2:00pm - 3:00pmSteering Committee / Faculty Meeting