7th C-DEN Workshop

Friday, November 8, 2019
9:30am to 5:00pm
Carl Zeiss Facility
5160 Hacienda Dr
Dublin, CA 94568

The 7th C-DEN Workshop notes available here.

Free Registration
Please register for the 7th C-DEN Workshop here.
(We apologize for the inconvenience but due to Zeiss restrictions, webcasting of the workshop will not be available.)

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Important Timetable
Friday, Oct 4 Poster/Talk titles/advisors/categories due to Kyle
Monday, Oct 28 Final Poster Intro Slide (+ 200 word summary) / Posters / Talk Slides due to Kyle in PDF format

Agenda Outline
 8:30am - 9:30amRegistration / Refreshments
 
9:30am - 9:35am Welcome / Opening Remarks
Andrew Kahng (UCSD)
 
9:35am - 9:40am Speaker Introduction
Dr. Raj Jammy (President of Process Control Solutions SBU,
Carl Zeiss SMT)
 
9:40am - 10:10am Keynote
Failure and Materials Analysis in the Logic Integrated Circuit Industry: Status and Challenges
Dr. David Su (Former TSMC Director of Failure Analysis Division)
 
10:10am - 10:30am Faculty Talk / Design Enablement Theme Deep-Dive
DTCO/Pathfinding and Machine Learning
Professor Andrew Kahng
 
10:30am - 10:45am BREAK
 
10:45am - 12:15pm Student Technical Talks

Patterning
Hybrid RIE-ALE on Ni for EUV Mask Absorber
Gary Sang (UCLA)

Integration
Fine pitch (<=10um) Direct Cu-Cu Interconnects Using In-Situ Formic Acid Vapor Treatment
SivaChandra Jangam (UCLA)

Design Enablement
Holistic "Pathfinding" Design Technology Co-Optimization (DTCO) Beyond 5nm
Chia-Tung Ho (UCSD)
 
12:15pm - 1:15pm LUNCH
 
1:15pm - 2:00pm Student Poster "Lightning Round" Overviews

Patterning
  • Hybrid RIE-ALE on Ni for EUV Mask Absorber
    Gary Sang (UCLA)

  • Modelling Radiation Chemistry in EUV Materials
    Jonathan Ma (UC Berkeley)

  • Characterization of Latent Image in Photoresist
    Luke Long (UC Berkeley)

  • Phase Measurement for EUV Photomasks
    Stuart Sherwin (UC Berkeley)

Integration
  • Leveraging Display Technology for High Channel Count Brain Interfaces
    Andrew Bourhis (UCSD)

  • GaN Varactors for Wideband Telecom Tunable Filters
    Po Chun Chen (UCSD)

  • RigisTrate - An Interposer-less Elastomeric Fan-Out Wafer Level Packaging Technology
    Randall Irwin (UCLA)

  • Comprehensive Modelling of IGZO TFTs predictive of Multi-Stage Differential Amplifier Performance
    Ritwik Vatsyayan (UCSD)

  • Wafer-scale Processor Prototype
    Saptadeep Pal (UCLA)

  • Fine pitch (<=10um) direct Cu-Cu interconnects using in-situ formic acid vapor treatment
    SivaChandra Jangam (UCLA)

  • Linear GaN Multi-Fin MISHEMTs and Their Application in Anti-Jamming Radio Systems
    Woojin Choi (UCSD)
Design Enablement
  • Holistic "Pathfinding" Design Technology Co-Optimization (DTCO) Beyond 5nm
    Chia-Tung Ho (UCSD)

  • Design Impacts of LER in EUV Lithography
    Eugene Chu (UCLA)

  • SVM Learning for GFIS Trimer Health Monitoring in Helium-Neon Ion Beam Microscopy
    Hsin Yu Liu (UCSD)

  • Multi-bit Combination Cell Placement for Power Reduction
    Minsoo Kim (UCSD)
2:00pm - 3:30pm Poster Session / Refreshments
 
3:30pm - 4:00pm Steering Committee Meeting
 
4:00pm - 4:30pmSteering Committee + Faculty Meeting
 
Parking