10:00am - 10:30am |
Coffee and welcome
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10:30am - 10:45am |
Introduction Prof. Andrew Kahng |
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10:45am - 11:15am |
High NA EUV: Getting Closer to Introduction Dr. Chris Spence, ASML |
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11:15am - 11:30pm |
Break |
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11:30am - 12:30pm |
Student talks
- Extending the Plasma-Thermal ALE Landscape to New Modifiers and Metal Systems, Taylor Smith (UCLA)
- Computational Aberration Correction Beyond Deconvolution, Amit Kohli (UCB)
- Chiplets: How Small is too Small, Alexander Graening (UCLA)
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12:30pm - 1:30pm |
Lunch
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1:30pm - 2:30pm |
Poster Session
- Extending the Plasma-Thermal ALE Landscape to New Modifiers and Metal Systems, Taylor Smith (UCLA)
- Computational Aberration Correction Beyond Deconvolution, Amit Kohli (UCB)
- Chiplets: How Small is too Small, Alexander Graening (UCLA)
- PROBE3.0: An Open-Source Framework for DTCO and Pathfinding of Scaling Boosters, Dooseok Yoon (UCSD)
- TrueAdapt(TM) - AI Based Maskless Patterning to Compensate for Die-Shift in Fan-Out Wafer Level Packaging, Golam Sabbir (UCLA)
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2:30pm - 3:00pm |
Steering Committee Discussion |
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3:00pm - 3:30pm |
Feedback |