2023 Workshop
Friday, March 10, 2023



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Agenda Outline
10:00am - 10:30am Coffee and welcome
   
10:30am - 10:45am Introduction
Prof. Andrew Kahng
   
10:45am - 11:15am High NA EUV: Getting Closer to Introduction
Dr. Chris Spence, ASML
   
11:15am - 11:30pm Break
   
11:30am - 12:30pm Student talks
  • Extending the Plasma-Thermal ALE Landscape to New Modifiers and Metal Systems, Taylor Smith (UCLA)
  • Computational Aberration Correction Beyond Deconvolution, Amit Kohli (UCB)
  • Chiplets: How Small is too Small, Alexander Graening (UCLA)
   
12:30pm - 1:30pm Lunch
   
1:30pm - 2:30pm Poster Session
  • Extending the Plasma-Thermal ALE Landscape to New Modifiers and Metal Systems, Taylor Smith (UCLA)
  • Computational Aberration Correction Beyond Deconvolution, Amit Kohli (UCB)
  • Chiplets: How Small is too Small, Alexander Graening (UCLA)
  • PROBE3.0: An Open-Source Framework for DTCO and Pathfinding of Scaling Boosters, Dooseok Yoon (UCSD)
  • TrueAdapt(TM) - AI Based Maskless Patterning to Compensate for Die-Shift in Fan-Out Wafer Level Packaging, Golam Sabbir (UCLA)
   
2:30pm - 3:00pm Steering Committee Discussion
   
3:00pm - 3:30pm Feedback